Research on the Characteristics of Radial Gas Bearings with Small Orifice Restrictors in a Vacuum Environment
The eddy torque in the single-axis air floating platform is mainly caused by the manufacturing errors of the radial air floating bearings.CFD software was used to first study the influence patterns of the vacuum environment on the carrying capacity and gas consumption of the orifice-throttled radial air floating bearings,and then the patterns of the simplified and measured common manufac-turing errors'effects on the eddy torque under vacuum environment were compared and analyzed.Under normal and vacuum environ-ments,when the inlet and outlet pressure differentials are the same,the static load-carrying capacity of the normal environment is supe-rior to that of the vacuum environment.When the outlet pressure gradually approaches vacuum,the decreasing trend of the carrying ca-pacity becomes more pronounced;the average gas consumption under vacuum is smaller than under normal pressure.When analyzing the simplified manufacturing errors,the eddy torque shows a sinusoidal periodic variation,and its peak occurrence pattern is related to the relative position of the manufacturing error.Based on actual error measurement data,the modeling analysis finds that the eddy torque fluctuates within a certain range,which is the result of the joint effect of the shaft neck manufacturing error and the orifice diameter manufacturing error.The number and position of the peaks are consistent with the number and relative position of the orifices,and the or-ifice diameter manufacturing error also affects the results of the peak eddy torque.
vacuumair bearingorifice throttlingmanufacturing errorseddy current torque
万方数据
维普
