Study on Process Parameter Optimization and Test of Monocrystalline Silicon Based on GRA Microfine Milling
In order to meet the requirements of surface roughness,upper port size precision and material removal rate of the bottom of monocrystalline silicon microgroove in practical application,the processing method of microfine milling was selected,and the above three evaluation indexes were optimized by grey correlation analysis.By designing the orthogonal test,the predicted values of the evalua-tion indexes were obtained,and the relationship between each index and the process parameters was analyzed.Then the grey correlation method was used to calculate the grey correlation coefficient of each evaluation index of the test sequence,and the grey correlation de-gree of each test sequence was ranked,so as to obtain the best combination of process parameters,and many experiments were carried out to verify its feasibility.The micro-groove with surface roughness of 71.2 nm is machined,and the machining quality and precision of micro-grooves are improved.
fine millingmonocrystalline silicongrey correlation analysisparameter optimization
NETL
NSTL
万方数据
