机床与液压2024,Vol.52Issue(15) :137-142.DOI:10.3969/j.issn.1001-3881.2024.15.021

用于低相干干涉测量系统的多通道数字与模拟信号同步采集方法研究

Research on Multi-channel Digital and Analog Signal Synchronous Acquisition Method for Low Coherence Interferometric Measurement Systems

丁斌 何飞飞 毛敏 祖洪飞 陈骏 张翔 陈旭雯
机床与液压2024,Vol.52Issue(15) :137-142.DOI:10.3969/j.issn.1001-3881.2024.15.021

用于低相干干涉测量系统的多通道数字与模拟信号同步采集方法研究

Research on Multi-channel Digital and Analog Signal Synchronous Acquisition Method for Low Coherence Interferometric Measurement Systems

丁斌 1何飞飞 1毛敏 1祖洪飞 2陈骏 2张翔 3陈旭雯4
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作者信息

  • 1. 南通市计量检定测试所,江苏南通 226007
  • 2. 浙江理工大学机械学院,浙江杭州 310018
  • 3. 浙江谱麦科技有限公司,浙江宁波 315048
  • 4. 浙江龙宇智能科技有限公司,浙江海宁 314419
  • 折叠

摘要

在现代工程领域中,模拟信号和数字信号同步采集的重要性变得越来越显著.同步采集这两种类型的信号可以提高数据采集和处理的准确性、可靠性,并避免数据延迟、抖动等问题,尤其对于一些特定应用场景具有极高的必要性.为了适应低相干干涉测量系统中多类型多路信号的同步采集与处理需求,基于已有的数据采集仪,设计并制作了数字信号调理板,并通过实验验证了数字信号与模拟信号的同步采集情况.实验结果表明:所设计的系统不仅可以实现两种信号的高速同步采集,而且系统整体位移采集的精度很高:电动位移台在0~70mm行程内,系统测量值与干涉仪测量值最大误差为2.52 am;压电位移台在0~320 μm内,系统测量值与干涉仪测量值最大误差仅为0.54 μm.

Abstract

In modem engineering,the importance of simultaneous acquisition of analog and digital signals is more and more signifi-cant.Simultaneous acquisition of both types of signals can improve the accuracy and reliability of data acquisition and processing,and avoid problems such as data delays and jitter,which are highly necessary especially for some specific application scenarios.In order to adapt to the synchronous acquisition and processing requirements of multiple types of multi-channel signals in low coherence interfer-ometry systems,a digital signal conditioning board was designed and fabricated based on the existing data acquisition instrument,and the synchronous acquisition of digital and analog signals was verified through experiments.The experimental results indicate that the de-signed system can not only achieve high-speed synchronous acquisition of two types of signals,but also has high accuracy in displace-ment acquisition:within the range from 0 mm to 70 mm stroke of the electric displacement stage,the maximum error is 2.52 μm and the maximum error for the piezoelectric displacement stage from 0 μm to 320 μm stroke is only 0.54 μm.

关键词

同步采集/模拟信号/数字信号/低相干干涉/光栅调理

Key words

simultaneous acquisition/analog signal/digital signal/low coherence interferometry/grating conditioning

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基金项目

江苏省市场监督管理局科技计划项目(KJ21125021)

宁波市重点研发计划暨"揭榜挂帅"项目(2023Z135)

宁波市重点研发计划暨"揭榜挂帅"项目(2023Z131)

2021年海宁市协同创新项目(20210101)

出版年

2024
机床与液压
中国机械工程学会 广州机械科学研究院有限公司

机床与液压

CSTPCD北大核心
影响因子:0.32
ISSN:1001-3881
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