Development of High-Precision Aerostatic Guide Rails
In order to develop an aerostatic guide rail suitable for high-precision machining,a closed structure was used to ensure guide rail accuracy and rigidity.By constructing a fluid-structure coupling simulation model for the aerostatic guide rail,the force de-formation of guide rail components in the flow field was analyzed to verify part strength.A deflection accuracy prediction model was es-tablished to examine guide rail accuracy variations under combined effects of flow field spatial changes and part deformation.Through simulation,component and part deformations are within 0.31 μm and 24 μm,respectively,meeting strength requirements for the guide rail structure.The straightness was measured by using an inductive displacement sensor.The results show that the vertical and horizontal straightness of the guide rail are within 0.344 μm and 0.451 μm,respectively,which is consistent with the predicted model results.
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