Energy beam-based direct and assisted polishing techniques for diamond:A review

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外文摘要：Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond.To address these challenges,several polishing methods have been developed for both single crystal diamond(SCD)and polycrystalline diamond(PCD),including mechanical,chemical,laser,and ion beam processing methods.In this review,the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted.Specifically,various energy beam-based direct and assisted polishing technologies,such as laser polishing,ion beam polishing,plasma-assisted polishing,and laser-assisted polishing,are summarized.The current research progress,material removal mechanism,and influencing factors of each polishing technology are analyzed.Although some of these methods can achieve high material removal rates or reduce surface roughness,no single method can meet all the requirements.Finally,the future development prospects and application directions of different polishing technologies are presented.

外文关键词：

single crystal diamondpoly crystalline diamondenergy beam polishing technologymaterial removal mechanisminfluencing factors

作者：

Zhuo Li、Feng Jiang、Zhengyi Jiang、Zige Tian、Tian Qiu、Tao Zhang、Qiuling Wen、Xizhao Lu、Jing Lu、Hui Huang

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作者单位：

Institute of Manufacturing Engineering,Huaqiao University,Xiamen 361021,People's Republic of China

State Key Laboratory of High Performance Tools,Huaqiao University,Xiamen 361021,People's Republic of China

School of Mechanical,Materi-als,Mechatronic and Biomedical Engineering,University of Wollongong,Wollongong,NSW 2522,Australia

School of Mechanical,Materials,Mechatronic and Biomedical Engineering,University of Wollongong,Wollongong,NSW 2522,Australia

College of Mechanical Engineering and Automation,Huaqiao University,Xiamen 361021,People's Republic of China

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基金：

国家自然科学基金国家自然科学基金Major Science and Technology Projects in Henan Province高等学校学科创新引智计划(111计划)

项目编号：

51835004U22A20198221100230300B23011

出版年：

2024

DOI：

10.1088/2631-7990/acfd67

极端制造(英文)

CSTPCDEI

ISSN：

年,卷(期)：2024.6(1)