To evaluate the effect of ion source assistance on different oxide films,TiO2,Ta2O5,ZrO2 and SiO2 were deposited with different radio frequency(RF)sources.The index and thickness were measured by a spectroscopic ellipsometer.The Young's module and the hardness of these films were compared.Experiments show that the value of Young's module and hardness are increased,2 GPa for TiO2,4 GPa for Ta2O5,2 GPa for ZrO2,in accordance with the film index.The nano-indention method is effective in evaluating the ability of ion sources.
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