A 32×32 Geiger-mode silicon laser focal plane array detector was developed for the long-distance or weak-laser detection of the 3-D imaging system using the wavelength in range of 350 nm～1100 nm.This detector is mainly composed of silicon avalanche photodiode array,readout circuit chips,microlens arrays,semiconductor refrigerators,and pin-grid array shells.The silicon avalanche photodiode focal plane arrays,adopts the structure of pull through N+-Π1-P--Π2-P+and works at the Geiger mode.The processing of thin photosensitive areas has been achieved through Si wafer back polishing and blind hole etching technology.An active-quenching-mode design was adopted to control the dead time of the circuit unit within 50 ns.An optimized time-to-digital converter circuit scheme with phase shift technology was used to achieve a time resolution within 2 ns while reducing the power consumption of the readout circuit chip.The results show that under the conditions of reverse bias voltage of 14 V and operating temperature of-40℃,the detector can achieve an average photon detection efficiency of 20.7%and an average dark counting rate of 0.59 kHz at the target wavelength of 850 nm,with a time resolution of 1 ns and an effective pixel rate better than 97%.This study provides a reference for the development of thin-type back-illuminated silicon-based laser focal plane detectors.
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