The precision of traditional precision positioning stages are limited due to mechanical friction,so it is difficult to meet the motion requirements of large stroke and high precision.In this paper,a single drive rigid-flexible coupling positioning stage combined with macro-micro composite structure was proposed.Compared with the other macro-micro composite stage,it greatly simplified the design of mechanical structure and motion control system.Based on the floating coordinate method and finite element method,the static and dynamic model of the single drive rigid-flexible coupling positioning stage was established.The analysis results of these models were compared with the static analysis results of ABAQUS finite element software and the analytical solution of the simplified dynamic model,the maximum relative errors were 1.6%and 3.72%respectively.It is proved that this theoretical model has high prediction accuracy,which can provide parameters for the optimal design and precision motion control of the single drive rigid-flexible coupling stage.
关键词
机械工程/刚柔耦合动力学/有限元分析/柔性铰链/定位平台
Key words
mechanical engineering/rigid-flexible coupling dynamics/finite element analysis/flexure hinge/positioning stage
维普
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