Temperature compensation method of biaxial inclination sensor
The inclination sensors based on MEMS accelerometers has been widely used.However,it is well known that a large temperature drift exists in MEMS accelerometers.In this paper,the temperature compensation method based on the normalization of diagonal elements of the transformation matrix was proposed.Both the transformation matrix accounting for the sensitivity,non-orthogonality and misalignment and the other matrix accounting for the bias were obtained with the conventional six-position method.The problem that the matrix related to the sensitivity inconsistence can't be separated from the matrix related to the non-orthogonality was overcome through the normalization of the diagonal elements of transformation matrices obtained under the different temperatures relative to the corresponding elements in the transformation matrices obtained under the room temperature.As a result,the temperature drift of the sensitivity and bias of MEMS accelerometers was compensated.Under the testing temperature of-20℃～50℃,the precision of the inclination sensor was obviously improved after compensation.
inclination sensortri-Axial MEMS accelerometerstemperature compensation modelnormalization of the diagonal elements of transformation matrices
万方数据
维普
