首页|基于空间光调制器的激光光束宽度调节装置

基于空间光调制器的激光光束宽度调节装置

Adjustable Laser Beam Width Device Based on Spatial Light Modulator

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为了满足激光产业对光束宽度测量装置的溯源要求,提升激光光束宽度校准能力,针对400~700nm波段的激光器不同光束宽度校准的需求,设计了一套基于空间光调制器的激光光束宽度可调节装置,用于光束质量分析仪或激光光斑测量仪的校准.实验结果表明该装置在0.1~5.0 mm的宽度范围连续可调;利用部分相干光束抗环境扰动能力强的特点,其短期稳定性达99.5%,长期稳定性达99.1%,优于参考激光器96.8%的短期稳定性和96.3%的长期稳定性.此外,基于空间光调制器优越的光束整形能力,该装置可将输入的非规则光束输出为高斯光束.
In order to meet the traceability requirements of the laser industry for the beam width measuring device and improve the laser beam width calibration capability,a device which the laser beam width is continuously adjustable based on spatial light modulator(SLM)has been designed for the calibration of different beam widths of lasers in the 400~700 nm wavelength range,which is used for the calibration of beam quality analyzers or laser spot measurement instruments.The experimental results show that the device is continuously adjustable in the width range of 0.1~5.0 mm.This device utilizes the strong ability of partially coherent beams to resist environmental disturbances,its short-term stability is 99.5%and long-term stability is 99.1%,better than the short-term stability and long-term stability of reference laser which is 96.8%and 96.3%respectively.In addition,based on the superior beam shaping ability of SLM,the device can output the irregular beam to Gaussian beam.

optical metrologylaser beam widthspatial light modulatorcontinuously adjustablebeam shapingpartially coherent beamstability

糜宸坤、杨朝辉、刘宏欣、王飞

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苏州市计量测试院,江苏苏州 215000

苏州大学物理与科学技术学院,江苏苏州 215000

光学计量 激光束宽度 空间光调制器 连续可调 光束整形 部分相干光束 稳定性

国家重点研发计划

2022YFF0705500

2024

计量学报
中国计量测试学会

计量学报

CSTPCD北大核心
影响因子:0.303
ISSN:1000-1158
年,卷(期):2024.45(2)
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