一种高容MLCC介质层陶瓷晶粒的分析方法
A Analysis Method for Ceramic Grains of High-capacity MLCC
林显竣 1李冬梅 1黄木生 1吴炜坚1
作者信息
- 1. 广东微容电子科技有限公司,广东 深圳 518000
- 折叠
摘要
片式多层陶瓷电容器(MLCC)介质层中陶瓷晶粒的尺寸、形状以及分布对于改善并提高MLCC的性能具有重要的研究意义.为了分析高容MLCC介质层的陶瓷晶粒的形貌,本文采用氯化铁置换MLCC剖面金属电极层,再放入箱式气氛炉进行热腐蚀,利用扫描电子显微镜对热腐蚀后的样品进行分析.采用化学腐蚀和热腐蚀相结合的方法,结果表明:经过氯化铁腐蚀内电极后,利用箱式氮气气氛炉,升温速率30℃/min,并控制最高温度和保温时间,腐蚀出的陶瓷晶粒边界清晰,周围无金属电极膨胀遮挡.本文的研究方法可应用于MLCC介质层陶瓷晶粒的分析.
Abstract
It holds significant research implications that size,shape and distribution of the ceramic grains in the dielectric layer of chip multilayer ceramic capacitor(MLCC)for improving the performance of ML-CC.In order to analyze the morphology of ceramic grains in dielectric layer of high capacity MLCC,in this paper,the metal electrode layer of MLCC profile was replaced by ferric chloride,put into a furnace for thermal corrosion,then observed and analyzed the sample by SEM.Using a combination of chemical corrosion and thermal corrosion,the result indicated that after the inner electrode was corroded by ferric chloride,the heating rate was 30℃/min in a box nitrogen atmosphere furnace,and the maximum tem-perature and holding time were controlled.The grain boundary of the corroded ceramic was clear and there was no metal electrode expansion shielding around them.The research result in this paper can be used to analyze the ceramic grains of MLCC dielectric layer.
关键词
片式多层陶瓷电容器/陶瓷晶粒/氯化铁/箱式气氛炉/热腐蚀Key words
multi layer ceramic capacitors/ceramic grains/ferric chloride/box atmosphere furnace/thermal corrosion引用本文复制引用
出版年
2024
NETL
NSTL
万方数据