Research on Digital Measurement and Control and Temperature Compensation Technology of Silicon Micro Gyro Based on FPGA
A silicon micro gyroscope consists of a gyroscope structure,and measurement and control circuit.With the improve-ment of analog interface circuits,the improvement of gyroscope performance mainly relies on the measurement and control and com-pensation algorithms in digital circuits.At present,the measurement and control circuits of silicon micro gyroscopes are developing in the direction of chip technology.In order to accelerate the process of chip-based measurement and control circuits of silicon micro gy-roscopes,Verilog HDL is used to design AGC and PLL for the closed-loop control of gyroscope amplitude and phase,and Coriolis force balance for the closed-loop detection.An orthogonal correction closed-loop was designed to address the orthogonal errors caused by processing.Based on the influence of temperature on the gyroscope,linear compensation was applied to the scale factor,and BP neural network compensation to the zero bias.The experimental results show that after this control system is applied,the relative stability of AGC is reached by 124 ppm,the relative stability of PLL by 79.1 ppm,and the zero bias stability of normal temperature conditions by 2.9°/h;The zero bias stability before compensation is reached by 17.7°/h within the temperature range of 0 ℃ to 65 ℃,and the zero bias stability after compensation by 9.1°/h.The temperature sensitivity of the scaling factor is reduced by one or-der of magnitude.The research results not only improve the performance of silicon micro gyroscopes,but also lay a good foundation for gyro ASIC design.
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维普
