Design of SDK for Equipment Communication Interface Based on SECS/GEM Protocol
SECS/GEM protocol is a communication standard applied between semiconductor manufacturing equipment and Manufacturing Execution System(MES)in semiconductor factory.The semiconductor equipment gets access to MES via communication in accordance with the requirements of SECS/GEM protocol.This paper applies object-oriented design method to design and develop software from top to bottom and puts forward an SDK integrating SECS/GEM standard for semiconductor equipment communication,which can be used for secondary development of equipment side applications to add the communication capability to the equipment.The SDK layers and implements SECS/GEM standards,encapsulates them in the form of dynamic link libraries,and provides advanced interfaces.Configuration files are designed to separate the inherent characteristics of the equipment and deploy them on different types of equipment.After testing,it is verified that the SDK can meet the requirements of SECS/GEM communication and realize the capabilities described in the standard.It can be applied to the SECS/GEM communication development of various semiconductor manufacturing equipment to realize the interconnection with the MES of semiconductor factories.
SECS/GEMsemiconductor equipment communication standardfactory automationnetwork communicationintelligent manufacturing
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