Effect of Sputtering Power on Microstructure and Tribological Properties of Direct-Current Magnetron Sputtered TiAlN Coating
TiAlN coating was prepared on 304L stainless steel surface by direct-current magnetron sputtering at room temperature.The effects of sputtering power(80,100,120,140,160 W)on the microstructure and tribological properties of TiAlN coating were studied.The results show that TiAlN coating consisted of TiAlN phase with a face-centered cubic structure and a small amount of TiN and AlN phases.With the increase of sputtering power,TiAlN coating was thickened and the surface grains became denser.However,the surface of the coating prepared at 160 W sputtering power had many large particles.With the increase of sputtering power,the grain size first decreased and then increased,the binding force first increased and then decreased,and the average friction coefficient and specific wear rate first decreased and then increased.The coating prepared at 140 W sputtering power had the smallest grain size,the strongest binding force,the smallest average friction factor and the specific wear rate.The wear scars were relatively flat and there were only a few abrasive chips under 140 W laser power and the wear mechanism was slight adhesive wear.
NETL
NSTL
万方数据
