Research progress on fluorine-containing electronic special gases for chip manufacturing
Fluorine-containing electronic special gases are indispensable key chemical materials mainly used in the etching and cleaning section of the chip manufacturing process.In this review,the traditional and new fluorine-containing special gases were firstly compared,with the main synthetic routes of the new fluorine-containing special gases summarized and the best industrialization route pointed out.The development status of fluorinated electronic special gases for chip manufacturing was then introduced.Finally,in view of the problems that the main intellectual property rights of fluorine-containing electronic special gases are currently monopolized by foreign developed countries,and the step-by-step operation of etching and cleaning processes leads to complicated and inefficient processes,which is difficult to meet the higher precision requirements such as high-end chip integration and yield,it was suggested that the future research directions should mainly focus on the development of new generations with the dual functions of etching/cleaning synergy,which can meet the major strategic needs of the country and have the advantages of simplifying the process,improving efficiency and the chip manufacturing yield,as well as replacing the current ones that are only used in a step-by-step manner.
electronic special gasesetchingcleaningchip manufacturinghigh-end chipsadvanced manufacturing processetching/cleaning synergy
NETL
NSTL
万方数据
维普
