Development and Application of High Clean Grinding Technology on Inner Wall of Special Gas Cylinder
Using electrochemical mechanical grinding technology and cylinder rotation and revolution grinding methods,and then through the internal shot blasting rust,high pressure water cleaning,inner wall grinding,third cleaning,deionization treatment and high vacuum and displacement and other key processes,A high clean grinding cylinder filled with 7N high purity electronic gas with a volume of 30～50L,meeting the Rmax1 S standard of Ra≤0.3μm on the inner wall of the cylinder,and the treated water content is less than 0.5 PPM,the oil content is less than 25mg/m2,the inner wall of the cylinder is uniform,and the grinding cycle is short.
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