During the operation of vacuum system in high-flux laser device,molecular contamination generated by the pump lubricating oil in the vacuum environment may diffuse and deposit on the surface of optical system components,induce damage under high-flux laser irradiation,and reduce the devices'load capacity.Research has been conducted on the cleanliness control of vacuum systems,and a series of technical measures have been developed to control the vacuum system cleanliness,including optimizing the vacuum pump group,increasing low-temperature cold trap adsorption,and adding online heating regeneration technology for the cold trap.The experimental research results show that after 120 h of continuous operation,the average surface deposition of non-volatile residues in the vacuum system reaches a clean level of 2.86 × 10-9 g/cm2 after 24 h;The transmittance at 350 nm and the damage density curve below 12.3 J/cm2 flux of the fused quartz optical test piece assessment group and control group are basically consistent,proving the effectiveness of this method.
关键词
高通量激光装置/真空系统/洁净度/光学元件/透过率/损伤密度
Key words
high-flux laser device/vacuum system/cleanliness/optical components/transmittance/damage density
维普
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