Study on Corrosion Inhibition and Synergistic Effects of BTA and TT-LYK on Copper CMP
In copper chemical mechanical polishing,the typical corrosion inhibitor benzotriazole(BTA)has a strong chemical protection effect on the copper surface,resulting in a low copper removal rate.In order to achieve better corrosion inhibition effect and copper surface quality,the corrosion inhibition effects of BTA corrosion inhibitor and novel inhibitor of ethanol,2,2'-[[(methyl-1H-benzotriazol-1-yl)methyl]imino]bis-(TT-LYK)in near-neutral solutions were com-pared.The mixed inhibition of these two inhibitors was also investigated.The results show that both of the corrosion inhibi-tors can effectively inhibit copper surface corrosion in near-neutral solutions.The combination of two corrosion inhibitors has a synergistic effect,and adding them to the polishing solution can achieve better copper surface quality and lower roughness.This may be due to their similar types of passivation films formed,which enables another inhibitor can supple-ment the passivation film generated by one inhibitor,resulting a denser and better protective dual-layer passive film on the metal surface.
chemical mechanical polishingcoppermixed corrosion inhibitorbenzotriazolesurface roughness
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