Tribological Properties of High Entropy Carbide(AlTiVCrNb)C Coating Prepared By Magnetron Sputtering
In order to improve the tribological properties of high-entropy alloy coatings,(AlTiVCrNb)C coatings were prepared by co-sputtering of graphite and high-entropy alloy,and the tribological properties of(AlTiVCrNb)C coatings were studied.Scanning electron microscopy(SEM)and X-ray diffraction(XRD)were used to analyze the composition,surface morphology and phase of the film.The hardness,elastic modulus and tribological properties of the coatings were tested by nanoindentation and ball-on-disk friction and wear tester.The wear of the coating was characterized by white light interference three-dimensional topography instrument.The experimental results show that with the increase of carbon content of the coating,the high entropy component changes from BCC/FCC dual phase to single FCC structure,and the mi-crostructure of the coating also changes.Due to the formation of carbides and solid solution strengthening,the coating exhib-its good tribological properties.When the carbon atom fraction of the coating is 20.83％,the friction and mechanical prop-erties of the coating are optimal,and the friction coefficient is the lowest of 0.35,the hardness and elastic modulus of the coating are the highest,which are 17.84 GPa and 182.72 GPa,respectively.It can be concluded that the high-entropy car-bide(AlTiVCrNb)C coating with good tribological properties can be obtained by co-sputtering graphite and AlTiVCrNb high-entropy alloy in magnetron sputtering process.
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