Effect of Oxidant Content on 304 Stainless Steel Chemical Mechanical Polishing
In order to investigate the effect and mechanism of oxidant content on 304 stainless steel chemical mechani-cal polishing,hydrogen peroxide was used as oxidant to study the changes in material removal rate and surface roughness values of 304 stainless steel at different content of oxidant.The mechanism of hydrogen peroxide in the polishing process was analyzed based on contact angle and electrochemical experiments.The results show that the increase of hydrogen perox-ide content in the chemical mechanical polishing process is beneficial to the generation of oxide film on the surface of 304 stainless steel,thus effectively improving the material removal rate and surface quality of 304 stainless steel.But too high content of hydrogen peroxide will lead to a dense oxide film on the surface of 304 stainless steel,causing an imbalance be-tween chemical and mechanical effects and resulting in a decrease in the surface quality of 304 stainless steel.When the mass fraction of hydrogen peroxide is 0.04％,the surface roughness value of polished 304 stainless steel is the lowest,only 2.5 nm,and the material removal rate reaches 324.21 nm/min.
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