Titanium-doped diamond-like carbon(Ti-DLC)films with different content of Ti element were deposited by a hybrid deposition system consisting of direct current(DC)and radio frequency(RF)magnetron sputtering.The effects of Ti contents on the microstructure and mechanical properties of Ti-DLC films were analyzed by SEM,XRD,Ra-man,nano-indentation and friction testing machine.Tribological property of Ti-DLC films at elevated temperature was dis-cussed.The results show that the proportion of sp3 bond in Ti-DLC films first increases and then decreases with the in-crease of Ti content due to Ti doping.Ti doping improves the hardness and elastic modulus of Ti-DLC films,and improves the adhesion force of Ti-DLC films to some extent.The friction coefficient and wear rate of Ti-DLC films at room tempera-ture decrease with the increase of Ti content.However,Ti-DLC films has obvious abrasive wear,and the wear rate is slight-ly higher than DLC film.Ti doping can effectively improve the thermal stability and high temperature tribological properties of DLC films.At 300 ℃,the friction coefficient and wear rate of Ti-doped films are still low.
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