Study on Preparation of Diamond-like Carbon Film on Copper Metal Surface and Its Mechanical Properties and Corrosion Properties
Using pure copper foil with the thickness of 0.025 cm as the substrate,methane as the carbon source,and hydrogen as the working auxiliary gas,the diamond-like carbon film(DLC)was prepared by RF-PECVD method with the change of radio frequency power.The influence of RF power on the copper metal microscopic morphology,hardness,friction coefficient and elastic modulus of DLC film was studied.The microscopic characterization was carried out by SEM,EDS,Raman spectroscopy and AFM atomic force microscope.Using elastic modulus tester,rotating friction tester and microhardness tester,the DLC film was studied.The results show that the DLC film exists and evenly disperses on the surface of the pure copper substrate when the RF power is 200 W.The maximum elastic modulus of DLC-coated copper metal is 75 GPa,the minimum average friction coefficient is 0.11 and the maximum microhardness is 15.4 GPa.The corrosion potential of copper metal coated with DLC film under 200W radio frequency power is-0.178 V,which is 25.8%higher than that of pure copper metal,and the corrosion current density is 1.429×10-8 A·cm-2,which is nearly half lower than that of pure copper metal.
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