首页|304不锈钢钝化膜的X射线光电子能谱刻蚀研究

304不锈钢钝化膜的X射线光电子能谱刻蚀研究

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通过X射线衍射仪测试了304 不锈钢表面钝化膜物相组成物.通过X射线光电子能谱仪中单原子氩离子和团簇离子枪采用不同的电压及不同时间对 304 不锈钢表面进行刻蚀;分析了电压及时间对304 不锈钢表面元素化合态影响.采用深度剖析法检测了钝化膜垂直于样品表面纵深元素分布.结果表明:不锈钢钝化膜外层为铁氧化物,内层为铬氧化物,钝化膜厚度约为120 nm.
Study on X-ray Photoelectron Spectrum Etching of 304 Stainless Steel Passivation Film
The composition of passivated film phase on the surface of 304 stainless steel was tested by X-ray diffraction,and the Monatomic and Gas Cluster Ion Source in the X-ray photoelectron spectroscopy were etched on the surface of 304 stainless steel at different voltages and different times.The influence of voltage and time on the surface element combination state of 304 stainless steel was analyzed.At the same time,the depth analysis method was used to detect the element distribution perpendicular to the depth of the passivation film on the surface of the sample.The results show that the outer layer of the passivation film is iron oxide and the inner layer is chromium oxide.The thickness of the passivation film is about 120 nm.

X-ray photoelectron spectrummonatomic and gas cluster ion sourcepassivated filmdepth analysis

李晓伟、安胜利、韩沛、范秀风

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内蒙古科技大学 分析测试中心, 内蒙古 包头 014010

X射线光电子能谱 单粒子氩离子及团簇离子枪 钝化膜 深度剖析

内蒙古科技厅项目

201803005

2024

热加工工艺
中国船舶重工集团公司热加工工艺研究所 中国造船工程学会船舶材料学术委员会

热加工工艺

CSTPCD北大核心
影响因子:0.55
ISSN:1001-3814
年,卷(期):2024.53(4)
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