The non-toxic ceramic films of TiN,ZrN and ZrTiN were deposited on the surface of Ti45Nb alloy by magnetron sputtering.The microscopic and phase structure of the samples were characterized by scanning electron microscopy and X-ray diffraction.The friction and wear properties of the samples were evaluated by a reciprocating friction tester,and their corrosion properties were evaluated by Tafel polarization and electrochemical impedance spectroscopy.The results show that the structures of the films are all face-centered cubic structures,and grow along the(200)direction preferentially.Compared with the TiN and ZrN films,the ZrTiN film is an alloyed composite film,which changes the columnar crystal growth mode of TiN and ZrN films,from columnar crystal growth to small single crystal aggregate growth to polycrystalline,forming a denser film.Furthermore,the wear rates of the Ti45Nb alloys modified with different nitride films were reduced by two orders of magnitude compared with that of the Ti45Nb alloys,with the ZrTiN films having the lowest wear rate.In the simulated body fluid,the corrosion resistance of ZrTiN film-modified Ti45Nb alloy has been improved to a certain extent.
magnetron sputteringnitride filmfriction and wearelectrochemical corrosion
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