基于磁控溅射的氮化物薄膜摩擦与腐蚀性能研究
Study on Friction and Corrosion Properties of Nitride Films Based on Magnetron Sputterin
刘凡 1林诗翔 1张明权 1杨秀杰 1唐正强1
作者信息
- 1. 贵州大学 机械工程学院,贵州 贵阳 550025
- 折叠
摘要
通过磁控溅射法在Ti45Nb合金表面溅射了TiN、ZrN和ZrTiN无毒陶瓷薄膜.采用扫描电镜、X射线衍射对样品的微观以及相结构进行了表征.样品的摩擦磨损性能通过往复式摩擦试验机进行评价,而其腐蚀性能通过Tafel极化和电化学阻抗谱测量来评价.结果表明:薄膜的结构都为面心立方结构,且都沿(200)方向择优生长.相比于TiN和ZrN薄膜,ZrTiN薄膜为合金化复合薄膜,改变了TiN、ZrN薄膜柱状晶生长模式,由柱状晶生长转变为小单晶聚合生长为多晶,形成更加致密的薄膜.此外,与Ti45Nb合金相比,不同氮化物薄膜改性的Ti45Nb合金的磨损率降低了两个数量级,其中ZrTiN薄膜具有最低的磨损率.在模拟体液中,ZrTiN薄膜改性的Ti45Nb合金的耐腐蚀性得到了一定的提高.
Abstract
The non-toxic ceramic films of TiN,ZrN and ZrTiN were deposited on the surface of Ti45Nb alloy by magnetron sputtering.The microscopic and phase structure of the samples were characterized by scanning electron microscopy and X-ray diffraction.The friction and wear properties of the samples were evaluated by a reciprocating friction tester,and their corrosion properties were evaluated by Tafel polarization and electrochemical impedance spectroscopy.The results show that the structures of the films are all face-centered cubic structures,and grow along the(200)direction preferentially.Compared with the TiN and ZrN films,the ZrTiN film is an alloyed composite film,which changes the columnar crystal growth mode of TiN and ZrN films,from columnar crystal growth to small single crystal aggregate growth to polycrystalline,forming a denser film.Furthermore,the wear rates of the Ti45Nb alloys modified with different nitride films were reduced by two orders of magnitude compared with that of the Ti45Nb alloys,with the ZrTiN films having the lowest wear rate.In the simulated body fluid,the corrosion resistance of ZrTiN film-modified Ti45Nb alloy has been improved to a certain extent.
关键词
磁控溅射/氮化物薄膜/摩擦磨损/电化学腐蚀Key words
magnetron sputtering/nitride film/friction and wear/electrochemical corrosion引用本文复制引用
基金项目
贵州省科技计划(黔科合基础[2020]1Y415)
贵州大学培育项目([2019]24号)
贵州省科技创新人才团队项目(黔科合平台人才[2020]5020)
出版年
2024
NETL
NSTL
万方数据