首页|块体硅高效氮化制备高α相氮化硅陶瓷研究

块体硅高效氮化制备高α相氮化硅陶瓷研究

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通过直接氮化法结合高能球磨制备高α相氮化硅块体.以硅粉为原料,添加不同质量分数的α-Si3N4 稀释剂混合冷压制成不同厚度的块体,在 1350℃氮化不同时间制备了Si3N4 块体,研究了块体硅直接氮化反应合成氮化硅块体的工艺因素,借助XRD检测手段测定氮化产物的物相组成.结果表明:含 15%稀释剂(α-Si3N4)、厚度为 3 mm的块体硅在流动氮气气氛下,于 1350℃保温 3 h的氮化效果最佳,氮化产物由 3 种物相组成,各物相的质量分数为 88.7%α-Si3N4、10.2%β-Si3N4、1.1%Si,合成了含高α相的氮化硅块体.本研究结果可为块体高α相氮化硅的高效制备提供实验依据.
Study on Preparation of High α-Phase Silicon Nitride Ceramics by Efficient Nitridation of Bulk Silicon
High α-phase silicon nitride bulk was prepared by direct nitridation method combined with high-energy ball milling.Taking silicon powder and α-Si3N4 diluents with different mass ratios as the raw material,the green block with different thicknesses were compressed,then the Si3N4 bulk materials were prepared by nitriding at 1350℃for different times.The process factors for the synthesis of silicon nitride bulk materials through direct nitridation reaction of silicon blocks were investigated.The results show that when the silicon block with a thickness of 3 mm and 15%diluent(α-Si3N4)content is nitrided at 1350℃for 3 h under a flowing nitrogen gas atmosphere,the nitridation effect is the best,and the products consist of three phases.The mass content of each phase is as follows:α-Si3N4(88.7%),β-Si3N4(10.2%),and Si(1.1%).The process successfully synthesizes silicon nitride bulk materials with a high α-phase content.The results of the study provide evidence for the efficient preparation of bulk silicon nitride with high α-phase content.

direct nitridingsilicon nitridediluent

张萌春、张菊梅、张腾、牛立斌、张国琛

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西安科技大学 材料科学与工程学院,陕西 西安 710054

直接氮化 氮化硅 稀释剂

2024

热加工工艺
中国船舶重工集团公司热加工工艺研究所 中国造船工程学会船舶材料学术委员会

热加工工艺

CSTPCD北大核心
影响因子:0.55
ISSN:1001-3814
年,卷(期):2024.53(23)