Research on temperature control of micro-grating accelerometer
Micro-grating accelerometers have become a research hotspot in recent years due to their advantages of extremely high sensitivity and resolution.But the change of ambient temperature will affect their output accuracy.In order to address the issue of temperature drift in micro-grating accelerometers,a two-stage internal and external temperature control system was proposed.By introducing the basic principle of micro-grating accelerometer,the influence of temperature characteristic of semiconductor laser and MEMS chip on micro-grating accelerometer was analyzed.A temperature control circuit was designed for the accelerometer,which was equipped with a two-stage internal and external temperature control system to maintain a consistent operating temperature.Finally,the system was tested experimentally.Experimental results show that the operating temperature control accuracy of the accelerometer can reach±0.02℃under the temperature control system.For the noise performance of the accelerometer,in the frequency band of 0.01～10 Hz,compared with the accelerometer without temperature control system,the overall signal-to-noise ratio is improved by 20 dB.
micro-gratingaccelerometertwo-stage temperature controltemperature control circuitsemiconductor laser
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