In the reduction process of polysilicon production,the inner wall of the reduction tube bell jar needs to be cleaned and decontaminated after each lifting.In order to solve the problem of incomplete cleaning and decontaminization of the inner wall of the bell jar,the cleaning effect of the inner wall of the bell jar of the reduction furnace under the same material and the same operating conditions was compared and studied by adjusting the cleaning process.This research can help to improve the cleanliness of the inner wall of the furnace bell jar and improve the quality of the furnace products.
维普
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