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基于金字塔微结构阵列的超灵敏压力传感器

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随着可穿戴电子产品的快速发展,柔性压力传感器因其在健康监测、人机界面和智能机器人方面的应用前景而受到极大的关注.在宽响应范围内的高灵敏度是为各种可穿戴场景制造可靠压力传感器的关键要求.其中以聚二甲基硅氧烷(PDMS)为主体材料的柔性压阻式传感器的发展十分迅速.本文以表面含有金字塔微结构阵列的PDMS作为传感器的基底,通过喷涂法将碳纳米管(CNT)墨水均匀喷涂在PDMS金字塔表面作为灵敏的导电网络,制备了一种具有宽检测范围的超高灵敏度的柔性压力传感器.在0~60kPa压强范围内,该传感器的灵敏度可达680 kPa-1,并且具有较低的迟滞性、较快的响应时间和恢复时间,以及较好的重复性和稳定性,可以实时监测脉搏的振动;还可以成功监测人体的生理信号和压力分布,显示出在可穿戴设备领域的广阔应用前景.
Ultrasensitive Pressure Sensors Based on Pyramidal Microstructure Arrays
With the rapid development of wearable electronics,flexible pressure sensors have received great attention for their promising applications in health monitoring,human-machine interfaces,and intelligent robotics.High sensitivity over a wide response range is a key requirement for fabricating reliable pressure sensors for various wearable scenarios.Among them,flexible piezoresistive sensors with polydimethylsiloxane(PDMS)as the main material are developing rapidly.In this paper,an ultra-high sensitivity flexible pressure sensor with a wide detection range was prepared by using PDMS containing pyramidal microstructure arrays on the surface as the substrate of the sensor,and carbon nanotube(CNT)ink was uniformly sprayed on the pyramidal surface of PDMS as a sensitive conductive network by spraying method.The sensor is sensitive up to 680 kPa-1 in the pressure range of 0~60 kPa,and has low hysteresis,fast response time and recovery time,and good repeatability and stability,and can monitor the vibration of pulse in real time.It can also successfully monitor the physiological signals and pressure distribution of the human body,showing promising applications in the field of wearable devices.

polydimethylsiloxanepyramidal microstructure arrayscarbon nanotubesflexible pressure sensors

李少朋、李科、冯立涵、王泓博、刘卫平、黄中杰

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东华大学材料科学与工程学院,上海 201620

聚二甲基硅氧烷 金字塔微结构阵列 碳纳米管 柔性压力传感器

2024

山东化工
山东省化工研究院 山东省化工信息中心

山东化工

影响因子:0.249
ISSN:1008-021X
年,卷(期):2024.53(17)