Ultrasensitive Pressure Sensors Based on Pyramidal Microstructure Arrays
With the rapid development of wearable electronics,flexible pressure sensors have received great attention for their promising applications in health monitoring,human-machine interfaces,and intelligent robotics.High sensitivity over a wide response range is a key requirement for fabricating reliable pressure sensors for various wearable scenarios.Among them,flexible piezoresistive sensors with polydimethylsiloxane(PDMS)as the main material are developing rapidly.In this paper,an ultra-high sensitivity flexible pressure sensor with a wide detection range was prepared by using PDMS containing pyramidal microstructure arrays on the surface as the substrate of the sensor,and carbon nanotube(CNT)ink was uniformly sprayed on the pyramidal surface of PDMS as a sensitive conductive network by spraying method.The sensor is sensitive up to 680 kPa-1 in the pressure range of 0~60 kPa,and has low hysteresis,fast response time and recovery time,and good repeatability and stability,and can monitor the vibration of pulse in real time.It can also successfully monitor the physiological signals and pressure distribution of the human body,showing promising applications in the field of wearable devices.