实验科学与技术2025,Vol.23Issue(1) :82-89.DOI:10.12179/1672-4550.20230483

XPS分析过程中射线对样品损伤探究

Study on the Radiation-Induced Sample Damage in X-Ray Photoelectron Spectroscopy

闫曙光 刘岁林 刘睿 宋红杰 吕弋
实验科学与技术2025,Vol.23Issue(1) :82-89.DOI:10.12179/1672-4550.20230483

XPS分析过程中射线对样品损伤探究

Study on the Radiation-Induced Sample Damage in X-Ray Photoelectron Spectroscopy

闫曙光 1刘岁林 1刘睿 2宋红杰 2吕弋3
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作者信息

  • 1. 四川大学分析测试中心,成都 610064
  • 2. 四川大学化学学院,成都 610064
  • 3. 四川大学分析测试中心,成都 610064;四川大学化学学院,成都 610064
  • 折叠

摘要

X射线光电子能谱(XPS)分析过程中,X射线会引起部分样品表面发生物理化学变化,导致获得的XPS数据不能真实反馈样品表面物理化学状态.明确X射线对样品表面物理化学性质的影响和规律,是准确获取XPS数据的关键.实验选取多种具有代表性的样品,获得了连续X射线辐照下XPS分析结果,探究了X射线对样品表面物理化学状态的影响.结果表明,对于部分特殊样品X射线会产生表面物理灼伤、热分解、破坏不稳定化学键,甚至引起还原反应.该文阐述了XPS分析过程中X射线对样品表面物理化学状态影响的规律和降低X射线对分析结果影响的方法,为高效、准确获得XPS数据提供了理论支撑.

Abstract

High energy X-ray irradiation can cause physicochemical changes on the surface of some samples,causing in the obtained X-ray photoelectron spectroscopy(XPS)data cannot truly give feedback to the physicochemical state of the sample surface in the process of XPS analysis.Clarifying the influence and rules of X-ray on the physicochemical properties of the sample surface is the key to accurately obtaining XPS data.Herein,a variety of representative materials are selected to obtain the XPS analysis results under continuous X-ray irradiation,and the effect of X-ray on the physicochemical state of the sample surface is explored.The results reveal that X-ray could cause surface physical burns,thermal decomposition,destroying unstable chemical bonds,and even inducing reduction reactions for specific samples.The regularity of the influence of X-rays on the physicochemical states of the sample surface during XPS analysis and the method of reducing the influence of X-rays on the analysis results are described,which provides a theoretical support for efficient and accurate acquisition of XPS data.

关键词

X射线光电子能谱/X射线辐照/结合能/物理损伤/化学损伤

Key words

X-ray photoelectron spectroscopy/X-ray irradiation/binding energy/physical damage/chemical damage

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出版年

2025
实验科学与技术
四川省高教学会,电子科技大学

实验科学与技术

影响因子:0.762
ISSN:1672-4550
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