首页|柔性压力传感器的制备和电学特性实验研究

柔性压力传感器的制备和电学特性实验研究

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将科研成果"柔性压力传感器的制备、性能与机理研究"转化为材料专业的本科综合性实验.利用简易的刻蚀法制备电容式晶体管压力传感器,通过柔性聚对苯二甲酸乙二醇酯(PET)作为衬底、依次旋涂聚合物半导体、聚甲基丙烯酸甲酯绝缘层,使用掩膜版进行UVO表面刻蚀得到 100~400 纳米深度的沟道,填充一层半导体后蒸镀栅极.使用半导体测试仪进行电学性能表征,得到器件迁移率、开关比等参数,引入不同压强后测试器件的压力灵敏度等参数.实验结果表明,晶体管型压力传感器对压力有显著的响应.以制备压力传感器为主线,内容涉及有机晶体管的制备、简单图案化、压力传感工作原理和物理参数的掌握,可作为一个基础性和研究性兼具的光电综合性新实验.实验主要面向材料物理专业大三年级的学生,培养学生思考、分析问题、解决问题能力的同时促进知识的创新和拓展.
Preparation of flexible pressure sensor and electric property study
The scientific research achievement"Study on the Synthesis,electrical behavior and mech-anism of flexible pressure sensor"was transformed into a comprehensive undergraduate experiment in materials major.This experiment designed a field-transistor based pressure senor using a simple etch-ing method,with the flexible polyethylene terephthalate(PET)as the substrate,spinning-coated pol-ymer semiconductor and polymethyl methacrylate insulating layer,UVO surface etching channels of 100-400 nm depth via a shadow mask,buffer layer and finally a gate electrode.A semiconducting an-alyzer was used to characterize the electronic properties of the device,to get the parameters of mobility and on/off ratios;to test the sensitivity and response time under the applied pressure.The results showed that the as-prepared sensor displayed good sensitivity to the applied pressures.This work focu-ses on the preparation and characterization of pressure sensor,containing the organic transistor fabrica-tion,simple patterning,the working mechanism and related parameters,which could be a new basic and research-oriented material physics comprehensive experiment.This experiment is primarily de-signed for third-year students majoring in material physics.It aims to cultivate students'abilities in thinking,problem analysis,and problem-solving,while also promoting knowledge innovation and ex-pansion.

pressure sensorcapacitancesensitivityflexible

张敬、刘志琦、李文举

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南京邮电大学 材料科学与工程学院,江苏 南京 210023

压力传感器 电容 灵敏度 柔性

国家自然科学基金江苏省特聘教授基金

61774087

2024

实验室科学
南开大学 中国高等教育学会

实验室科学

影响因子:0.805
ISSN:1672-4305
年,卷(期):2024.27(5)