首页|感光材料的制备及微纳加工综合实验设计

感光材料的制备及微纳加工综合实验设计

扫码查看
原文链接
  • 万方数据
  • 维普
在新时代"新工科"教育背景下,贴近科技发展前沿,培养家国情怀,提高学生的专业实验水平和科技创新能力意义重大.从当前"卡脖子"的热点问题出发,开展与芯片加工相关的光刻实验.通过使用商用光刻胶,要求学生掌握光刻的理论知识和基本流程;在此基础上,利用感光溶胶-凝胶法自制一种感光材料,并与商用光刻胶进行对比,让学生深入了解光刻胶的特性及其国外垄断和断供现状.通过本实验的学习,可以加深学生对专业知识的认知,同时激发学习热情,这对于培养具有国际视野、家国情怀的高层次、应用型人才十分重要.
Comprehensive experiment design of photosensitive materials preparation and the micro-nano fabrication
Under the background of"Emerging Engineering"education in the new era,it is of great significance to aim at the frontier of scientific and technological development,cultivate students'feel-ings of family and country and improve their professional experiment level and innovation ability.In this paper,fucus on the"strangle hold"technology,photolithography experiments related to chip pro-cessing have been carried out.By using commercial photoresist,students are required to master the theoretical knowledge and basic process of photolithography.Then,a photosensitive material was pre-pared by photosensitive sol-gel and compared with the commercial photoresist.There studies can help students to further learn the characteristics of photoresist and know well the monopoly and supply dis-ruption crisis of this materials.Through the study of this experiment,students can deepen their under-standing of professional knowledge and stimulate their enthusiasm for learning.It is very important for cultivating high-level and applied talents with international vision and national feelings.

emerging engineeringcomprehensive experimental designphotolithographyphotosen-sitive sol-gel

王哲哲、贾思仪、杨晨、冯卓宏、王丽丽、陈水源

展开 >

福建师范大学物理与能源学院,福建 福州 350117

福建师范大学物理学国家级实验教学示范中心(福建师范大学),福建 福州 350117

新工科 综合实验设计 光刻 感光溶胶-凝胶

福建省教育教学研究重大项目2021年高等学校大学物理课程教学指导委员会华东地区工作委员会教学研究项目福建师范大学碳中和研究院开放基金2021年福建师范大学课程思政示范课程建设项目

FBJY202302872021JZWHD04TZH2022-08K202101041

2024

10.3969/j.issn.1672-4305.2024.05.009

实验室科学
南开大学　中国高等教育学会

实验室科学

影响因子：0.805
ISSN：1672-4305
年,卷(期)：2024.27(5)