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Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays

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Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays
High-resolution non-emissive displays based on elec-trochromic tungsten oxides(WOx)are crucial for future near-eye vir-tual/augmented reality interactions,given their impressive attributes such as high environmental stability,ideal outdoor readability,and low energy consumption.However,the limited intrinsic structure of inorganic materials has presented a significant challenge in achieving precise patterning/pixelation at the micron scale.Here,we successfully developed the direct photolithography for WOx nanoparticles based on in situ photo-induced ligand exchange.This strategy enabled us to achieve ultra-high resolution efficiently(line width<4 μm,the best resolution for reported inorganic electrochromic materials).Addition-ally,the resulting device exhibited impressive electrochromic performance,such as fast response(<1 s at 0 V),high coloration efficiency(119.5 cm2 C-1),good optical modulation(55.9%),and durability(>3600 cycles),as well as promising applications in electronic logos,pixelated displays,flexible electronics,etc.The success and advancements presented here are expected to inspire and accelerate research and development(R&D)in high-resolution non-emissive displays and other ultra-fine micro-electronics.

ElectrochromicDirect photolithographyWOx nanoparticlesIn situ photo-induced ligand exchangeHigh-resolution displays

Chang Gu、Guojian Yang、Wenxuan Wang、Aiyan Shi、Wenjuan Fang、Lei Qian、Xiaofei Hu、Ting Zhang、Chaoyu Xiang、Yu-Mo Zhang

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Laboratory of Optoelectronic Information Technology and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,People's Republic of China

Hangzhou Bay Laboratory of Advanced Nano-Optoelectronic Materials and Devices,Qianwan Institute of CNITECH,Ningbo 315336,People's Republic of China

Smart Materials for Architecture Research Lab,Innovation Center of Yangtze River Delta,Zhejiang University,Jiaxing 314100,People's Republic of China

University of Science and Technology of China,Hefei 230026,People's Republic of China

State Key Lab of Supramolecular Structure and Materials,College of Chemistry,Jilin University,Changchun 130012,People's Republic of China

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Electrochromic Direct photolithography WOx nanoparticles In situ photo-induced ligand exchange High-resolution displays

2025

纳微快报(英文)
上海交通大学

纳微快报(英文)

ISSN:2311-6706
年,卷(期):2025.17(3)