Polycrystalline CdTe thin films were prepared by close-spaced sublimation(CSS)and annealed in different condition.The thin films were characterized by scanning electron microscopy(SEM),X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS)and Auger Electron Spectroscopy(AES).XRD patterns show that as-deposited CdTe thin films are in a cubic phase and have the preferred orientation in(111)direction.After annealed,crystal grains grow up and crystal boundary decrease.The compound probabilities of current carrier decrease therefore shunt resistance and drain current are improved greatly.Detailed analysis of X-ray photoelectron spectroscopy shows that the presence and content of tellurium oxide decrease with increasing depth,and TeCl2O may be present.
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