Design and Simulation of Micro-Accelerometer Based on Fifth Order ∑Δ Modulation
In order to suppress the bandwidth range noise of accelerometer signals,a closed-loop system based on a fifth-order ∑Δ modulator micromechanical accelerometer is designed,and the modulator is modelled under MATLAB/Simulink,the parameters are optimized,and the stability is discussed through behavioural level simulation.The system simulation shows that the signal-to-noise ratio is 122.9 dB with 20.12 effective bits at 1 024 Hz signal bandwidth when an acceleration signal of 1 g and frequency of 256 Hz is input.
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