首页|基于温度扫描方式的MEMS加速度计温度补偿研究

基于温度扫描方式的MEMS加速度计温度补偿研究

Temperature Compensation Research on MEMS Accelerometer Based on Temperature Scanning Mode

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当工作环境的温度发生变化时,MEMS加速度计的误差会随之而变大.针对这种情况,采取了一种温度补偿措施:对加速度计的零偏和标度因数进行温度建模,记录一定温度范围内加速度计输出数据的变化情况,对采集到的加速度计输出数据采用最小二乘的拟合方法进行拟合,计算出所需的修正系数,进行温度系数的修正补偿.补偿结果表明:经过模型补偿后,加速度计的输出精度变高,补偿效果明显.
When the temperature of the working environment changes,the error of the MEMS accelerometer will become larger.In view of this situation,a temperature compensation measure is adopted which performs temperature modeling on the zero bias and Scale Factor of the accelerometer,records the change situation of the output data of the accelerometer in a certain temperature range,fits the collected output data of the accelerometer by the Least Square Fitting method,calculates the required correction coefficient,and corrects and compensates the temperature coefficient.The compensation results show that the output accuracy of the accelerometer is higher and the compensation effect is obvious after the model compensation.

accelerometertemperature compensationtemperature modelingLeast Square Fitting

王建东、吴亚坤、徐海、朱军

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天津津航计算技术研究所,天津 300308

重庆大学 光电工程学院,重庆 401331

加速度计 温度补偿 温度建模 最小二乘法拟合

2024

现代信息科技
广东省电子学会

现代信息科技

ISSN:2096-4706
年,卷(期):2024.8(23)