Effects of the Position of Insulation Rings on Oxygen Contents of Czochralski Single Crystals
We used the professional crystal growth software CGSim developed by STR company to optimize the thermal field structure in a single crystal furnace.The results indicated that installing an insulation ring at the lower part of the main heater could effectively reduce the temperature at the bottom of the melt,weakened the convective strength inside the melt,reduced the degree of reaction between the melt with the quartz crucible,and reduced the oxygen contents of oxygen impuri-ties transported and condensed into the crystal rod.In addition,the vertical distance between the insulation ring and the main heater was directly related to the oxygen content inside the crystal rod.The results showed that as the distance be-tween the rings increased,the effect of suppressing melt convection becomed weaker;When the position of the insulation ring was lower than the bottom of the quartz crucible,the oxygen reduction effect of the insulation ring would be lost.Rea-sonably designing spacing could suppress the decomposition of oxygen impurities in quartz crucibles and reduce the oxygen content of crystal rods.The simulation results showed that when the annular distance was 30 mm,the oxygen content de-creased by a maximum of 0.6 ppma.
万方数据
维普
