Preparation Technology of Glued Prism Filter Film System based on Optical Control and Thickness Monitoring
The glued filter prism was mainly used to make the spectrum transmission or reflection of different wave bands to achieve the purpose of selecting the required radiation wave band from a series of wan bands,which was widely used in improving the image quality of the integrated optoelectronic system with two or more optical paths.However,in the actual processing,the glued filter prism film system with large gradient was due to the cumulative effect of film thickness error.The phenomenon of peak collapse often occurred in the transmission band near the steepness,which seriously affected the actual spectral performance of the glued filter prism.It was described that the principle of optical film transmittance con-trolling the stop point of film thickness,the direct optical control structure of the coating machine,and the conversion for-mula of the monitoring wavelength of the gluing prism and the optical controller,at the same times,we used the optical controller of the direct optical control system of the ARES1350 coating machine to monitor the glued prism filter film sys-tem,which improved the control accuracy of the film thickness,corrected the error accumulation of the film thickness.The technical specification were achieved including 790～825 nm,Ravg≥95％,895～935 nm,Tavg≥95％.The film quality met JB/T 8226.8-1999 test standard,it provided a new technological method for the control of transmittance near the steepness of this kind of large steepness glued filter prism.
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