首页|Mg、Zn元素对Cu/Al复层材料界面中间相的影响研究

Mg、Zn元素对Cu/Al复层材料界面中间相的影响研究

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为了研究Mg、Zn元素对Cu/Al复层材料界面中间相的影响,对 Cu/Al 复层材料进行退火热处理,通过XRD、扫描电镜和EDX能谱检测的方法对界面中间相进行分析,得到Mg、Zn元素对Cu/Al复层材料界面中间相分布规律和界面层断裂位置的影响结果.最后得出结论:完成 300℃×5 h 的退火热处理后,当界面为纯铜/纯铝时,Cu/Al界面处仅生成 CuAl2 相,界面层断裂发生在铜基体和 CuAl2 相之间;当界面为纯铜/铝合金时,在Mg、Zn元素的作用下,Cu/Al合金界面处并没有 CuAl2 相生成.完成400℃×5 h的退火热处理后,Cu/Al界面中间相分布均为 Cu9 Al4 和 CuAl2,但其厚度的分布有所差异,此时Mg元素和 Zn 元素的作用均不明显.完成 500℃×5 h 的退火热处理后,当界面为纯铜/纯铝时,Cu/Al界面中间相分布为Cu9 Al4、CuAl 和 CuAl2,界面层断裂发生在 CuAl 相或 CuAl2 相和 Cu9 Al4 相之间;当界面为纯铜/铝合金时,主要在Mg元素的作用下,此时Zn元素的作用并不明显,Cu/Al界面中间相分布变为Cu9 Al4、CuAl、Al5 Cu6 Mg2 和CuAl2,界面层断裂发生在CuAl2 相或CuAl相和CuAl2 相之间.
Research on Influence of Mg and Zn Elements on Interfacial Mesophases of Cu/Al Multilayer Materials
In order to study the influence of Mg and Zn elements on the interfacial mesophase of Cu/Al multilayer mate-rials,the Cu/Al multilayer materials were annealed,and the interfacial mesophase was analyzed by XRD,SEM and EDX energy spectrum detection methods,so it was obtained that the results of the influence of Mg and Zn elements on the distri-bution law of interfacial mesophase for Cu/Al multilayer materials and the fracture position of interfacial layer.Finally,the conclusions are drawn,that was,after annealing at 300℃×5 h,when the interface was pure copper/pure aluminum,only CuAl2 phase was generated at the Cu/Al interface,and the interface layer fracture occurred between the copper matrix and CuAl2 phase.When the interface was pure copper/aluminum alloy,no CuAl2 phase was formed at the interface of Cu/Al al-loy under the action of Mg and Zn elements.After annealing at 400℃×5 h,the mesophase uniform distribution of Cu/Al interface was Cu9 Al4 and CuAl2,but their thickness distribution was different,the effects of Mg and Zn were not obvious at this time.After annealing at 500℃×5 h,when the interface was pure copper/pure aluminum,the mesophase distribution of Cu/Al interface was Cu9 Al4,CuAl and CuAl2,the interface layer fracture occurred in CuAl phase or between CuAl2 phase and Cu9 Al4 phase.When the interface was pure copper/aluminum alloy,mainly under the action of Mg element,the effect of Zn element was not obvious at this time,the mesophase distribution of Cu/Al interface became Cu9 Al4,CuAl,Al5 Cu6 Mg2 and CuAl2,the interface layer fracture occurred in CuAl2 phase or between CuAl phase and CuAl2 phase.

Cu/Al multilayer materialsMg and Zn elementsannealinginterfacemesophase

黄国平、钟成、王晓卫、孟辉

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深圳市振华微电子有限公司 南京技术中心,江苏 南京 210001

Cu/Al复层材料 Mg、Zn元素 退火 界面 中间相

电子元器件科研项目

ZHXP023-1

2024

新技术新工艺
中国兵器工业新技术推广研究所

新技术新工艺

影响因子:0.294
ISSN:1003-5311
年,卷(期):2024.436(4)
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