抗高过载加速度计失效定位与故障复现
Fault Localization and Recurrence of Anti-high Overloads Accelerometers
李苏苏 1徐可 2师浩伟 1郑宇1
作者信息
- 1. 华东光电集成器件研究所,安徽 蚌埠 233000
- 2. 北方科技信息研究所,北京 100089
- 折叠
摘要
随着硅微机械系统技术的不断发展成熟,抗高过载加速度计已广泛应用于航空航天、兵器测试等振动冲击过程中加速度的测量,然而上万g乃至十万g以上的高过载对芯片的内部结构以及加速度计的封装提出了更高的要求.因此,运用多种失效分析手段,结合自制的抗高过载加速度计介绍了一种典型的断裂失效模式并进行了复现,最后给出了相应的使用建议.
Abstract
With the continuous development and maturity of silicon micro mechanical system technology,the anti-high overload accelerometers have been widely used for measuring acceleration in vibration and impact processes such as aero-space and weapon testing.However,high overloads of tens of thousands or even hundreds of thousands of grams posed higher requirements for the internal structure of chips and the packaging of accelerometers.By using various failure analysis methods and combining self-made anti-high overload accelerometers,we introduced a typical fracture failure mode and re-produced it,and finally provided corresponding usage suggestions.
关键词
爆炸力学/可靠性/抗高过载加速度计/失效分析Key words
explosion mechanics/reliability/anti-high overloads accelerometers/failure analysis引用本文复制引用
基金项目
国防基础科研计划项目(JCKY2021208B059)
出版年
2024
NETL
NSTL
万方数据