Fault Localization and Recurrence of Anti-high Overloads Accelerometers
With the continuous development and maturity of silicon micro mechanical system technology,the anti-high overload accelerometers have been widely used for measuring acceleration in vibration and impact processes such as aero-space and weapon testing.However,high overloads of tens of thousands or even hundreds of thousands of grams posed higher requirements for the internal structure of chips and the packaging of accelerometers.By using various failure analysis methods and combining self-made anti-high overload accelerometers,we introduced a typical fracture failure mode and re-produced it,and finally provided corresponding usage suggestions.
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