A Test Method to Evaluate Destructive Removal Efficiency(DRE)Used in Semiconductor Industry
In semiconductor industry,the tail gas treatment equipment was used to do environmental protection treat-ment for semiconductor process gas like CF4,NF3 and NH3 including combustion and washing.The destructive removal ef-ficiency(DRE)was a key parameter to evaluate the performance of tail gas treatment.A test method was specified to meas-ure and calculate the destructive removal efficiency(DRE),and we based on FTIR as measurement tool and used SF6 as tracer gas to measure the total flow of inlet port flow,total flow of outlet port,process gas concentration of inlet port and process gas of outlet port of the tail gas treatment equipment.And then DRE could be calculated based on formular to moni-tor the performance of the tail gas treatment equipment,which was significant for test standardization of the tail gas treat-ment equipment.
FTIRtail gas treatment equipmentdestructive removal efficiency(DRE)test method
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