首页|Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors

Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors

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Metal oxide semiconductors(MOSs)are ideal sensing materials for detecting volatile organic compounds due to their low cost,diversity,high stability,and ease of production.However,it remains a grand challenge to develop the MOSs-based gas sensors for sensing iso-propanol with desired performance via a simple,effective,and controllable method.Herein,we reported the prepa-ration of the Al-doped ZnO(AZO)/WO3 heterostructure films by directly depositing the AZO coating onto the WO3 coating using a strategy of magnetron sputtering.The AZO/WO3 heterostructure films were constructed by numbers of irregular nanoparticles that were intercon-nected with each other.The AZO/WO3 heterostructure films-based gas sensors exhibited excellent isopropanol-sensing performance with high response,promising selec-tivity,low detection limit,fast response rate,wide detec-tion range,and ideal reproducibility.The promising isopropanol-sensing performance of the AZO/WO3 heterostructure films arises mainly from their high unifor-mity,unique microstructures with high surface roughness,and the construction of the heterostructure between the AZO and WO3 coatings.This work provides a versatile approach to prepare the MOSs-based heterostructure films for assembling the gas sensors.

Metal oxide semiconductorsGas sensorsAl-doped ZnO/WO3Heterostructure filmsIsopropanolMagnetron sputtering

Wei-Xiang Gao、Xue-Ting Chang、Xiao-Jie Zhu、Jun-Feng Li、Ying-Chang Jiang、Dong-Sheng Wang、Chuan-Xiao Yang、Shi-Bin Sun

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College of Logistics Engineering,Shanghai Maritime University,Shanghai 201306,China

College of Ocean Science and Engineering,Shanghai Maritime University,Shanghai 201306,China

Institute of Logistics Science and Engineering,Shanghai Maritime University,Shanghai 201306,China

National Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaShanghai Municipal Natural Science Foundationthe"Shuguang"Program of Shanghai Education Commission

521720942220910521ZR142670019SG46

2024

10.1007/s12598-023-02406-w

稀有金属(英文版)
中国有色金属学会

稀有金属(英文版)

CSTPCDEI
影响因子：0.801
ISSN：1001-0521
年,卷(期)：2024.43(1)
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