稀有金属(英文版)2024,Vol.43Issue(1) :247-256.DOI:10.1007/s12598-023-02406-w

Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors

Wei-Xiang Gao Xue-Ting Chang Xiao-Jie Zhu Jun-Feng Li Ying-Chang Jiang Dong-Sheng Wang Chuan-Xiao Yang Shi-Bin Sun
稀有金属(英文版)2024,Vol.43Issue(1) :247-256.DOI:10.1007/s12598-023-02406-w

Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors

Wei-Xiang Gao 1Xue-Ting Chang 2Xiao-Jie Zhu 1Jun-Feng Li 1Ying-Chang Jiang 2Dong-Sheng Wang 2Chuan-Xiao Yang 1Shi-Bin Sun3
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作者信息

  • 1. College of Logistics Engineering,Shanghai Maritime University,Shanghai 201306,China
  • 2. College of Ocean Science and Engineering,Shanghai Maritime University,Shanghai 201306,China
  • 3. Institute of Logistics Science and Engineering,Shanghai Maritime University,Shanghai 201306,China
  • 折叠

Abstract

Metal oxide semiconductors(MOSs)are ideal sensing materials for detecting volatile organic compounds due to their low cost,diversity,high stability,and ease of production.However,it remains a grand challenge to develop the MOSs-based gas sensors for sensing iso-propanol with desired performance via a simple,effective,and controllable method.Herein,we reported the prepa-ration of the Al-doped ZnO(AZO)/WO3 heterostructure films by directly depositing the AZO coating onto the WO3 coating using a strategy of magnetron sputtering.The AZO/WO3 heterostructure films were constructed by numbers of irregular nanoparticles that were intercon-nected with each other.The AZO/WO3 heterostructure films-based gas sensors exhibited excellent isopropanol-sensing performance with high response,promising selec-tivity,low detection limit,fast response rate,wide detec-tion range,and ideal reproducibility.The promising isopropanol-sensing performance of the AZO/WO3 heterostructure films arises mainly from their high unifor-mity,unique microstructures with high surface roughness,and the construction of the heterostructure between the AZO and WO3 coatings.This work provides a versatile approach to prepare the MOSs-based heterostructure films for assembling the gas sensors.

Key words

Metal oxide semiconductors/Gas sensors/Al-doped ZnO/WO3/Heterostructure films/Isopropanol/Magnetron sputtering

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基金项目

National Natural Science Foundation of China(52172094)

National Natural Science Foundation of China(22209105)

Shanghai Municipal Natural Science Foundation(21ZR1426700)

the"Shuguang"Program of Shanghai Education Commission(19SG46)

出版年

2024
稀有金属(英文版)
中国有色金属学会

稀有金属(英文版)

CSTPCDCSCDEI
影响因子:0.801
ISSN:1001-0521
被引量2
参考文献量46
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