Abstract
The present study has proposed a compact process for the production of high-purity β-Ga2O3 powder by simply using gallium metal and water as the raw materials.The process basically consists of two essential steps including hydrothermal synthesis of GaOOH and calcination of GaOOH for the production of the target product of β-Ga2O3.Thermodynamic evaluation and sys-tematic experiments were conducted for process parameter optimization.X-ray diffractometer(XRD),scanning elec-tron microscopy(SEM),thermogravimetry-differential scanning calorimetry(TG-DSC)and X-ray photoelectron spectroscopy(XPS)were utilized to clarify the reaction mechanisms of the hydrothermal synthesis and transfor-mation of GaOOH to β-Ga2O3 by calcination.Chemical analysis of the final product of β-Ga2O3 obtained under the optimal conditions was carried out with inductively cou-pled plasma mass spectrometry(ICP-MS),and the results showed that the contents of the representative impurities such as Ni,Cu,In,Mn,Co,Zn and Cr are obviously lower than the requirement of 5N β-Ga2O3 standard,exhibiting excellent application prospect of the proposed process to produce high-purity β-Ga2O3.
基金项目
National Natural Science Foundation of China(51904003)
Key Research and Development Plan of Anhui Province(2022n07020004)
Natural Science Foundation of Anhui Province(2308085ME156)
Natural Science Foundation of Anhui Province(2108085J26)
Anhui Provincial Department of Education(2022AH050332)
NETL
NSTL
万方数据