首页|A compact route for efficient production of high-purity β-Ga2O3 powder

A compact route for efficient production of high-purity β-Ga2O3 powder

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The present study has proposed a compact process for the production of high-purity β-Ga2O3 powder by simply using gallium metal and water as the raw materials.The process basically consists of two essential steps including hydrothermal synthesis of GaOOH and calcination of GaOOH for the production of the target product of β-Ga2O3.Thermodynamic evaluation and sys-tematic experiments were conducted for process parameter optimization.X-ray diffractometer(XRD),scanning elec-tron microscopy(SEM),thermogravimetry-differential scanning calorimetry(TG-DSC)and X-ray photoelectron spectroscopy(XPS)were utilized to clarify the reaction mechanisms of the hydrothermal synthesis and transfor-mation of GaOOH to β-Ga2O3 by calcination.Chemical analysis of the final product of β-Ga2O3 obtained under the optimal conditions was carried out with inductively cou-pled plasma mass spectrometry(ICP-MS),and the results showed that the contents of the representative impurities such as Ni,Cu,In,Mn,Co,Zn and Cr are obviously lower than the requirement of 5N β-Ga2O3 standard,exhibiting excellent application prospect of the proposed process to produce high-purity β-Ga2O3.

β-Ga2O3Hydrothermal synthesisCalcinationPurityReaction mechanism

Xiao-Wei Zhou、Gao-Jie Chen、Liang Xu、Zhi-Jun Shao、Cheng Yang、Yong-Pan Tian、Zhuo Zhao

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School of Metallurgical Engineering,Anhui University of Technology,Maanshan 243032,China

School of Metallurgical Engineering,Anhui University of Technology,Ma'anshan 243032,China

Low-Carbon Research Institute,Anhui University of Technology,Ma'anshan 243032,China

National Natural Science Foundation of ChinaKey Research and Development Plan of Anhui ProvinceNatural Science Foundation of Anhui ProvinceNatural Science Foundation of Anhui ProvinceAnhui Provincial Department of Education

519040032022n070200042308085ME1562108085J262022AH050332

2024

稀有金属(英文版)
中国有色金属学会

稀有金属(英文版)

CSTPCDEI
影响因子:0.801
ISSN:1001-0521
年,卷(期):2024.43(9)
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