Role of K factor in ZAF iteration calculation and concrete analysis of ZAF correction coefficient for specimen with strong matrix effect
At present,ZAF method is the most commonly used correction method for quantitative analysis by electron probe microanalysis(EPMA).The essential of ZAF method is to accurately measure the K fac-tor of each element in the sample,and then the iterative calculation(mathematical correction)of K factors are conducted.The understanding of this correction process is helpful for the correct and accurate setting of experiment conditions in quantitative analysis.For the samples with high content of ultra-light elements or strong matrix effect,the K factors have great difference with the actual concentration.Meanwhile,the cor-rection coefficients are also higher.In this case,the accurate measurement of K factors is especially impor-tant.In this paper,the mathematical process of iterative calculation for ZAF method was deducted,indica-ting that K factor was the core of ZAF quantitative analysis.Based on the quantitative results of micro-re-gion analysis of CrTiAlC magnetron sputtering material(the mass fraction of carbon was about 8％),the physical reason for causing great difference between K factor and actual concentration of C and Al were an-alyzed,and each item of ZAF correction coefficients were investigated.The mathematical iteration process of ZAF quantitative analysis and the parameter setting for quantitative analysis of sample system with strong matrix effect could be further understood.
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