Analysis on key points for K factor measurement during quantification of carbon by ZAF
The quantitative analysis of ultralight elements is always one of difficulties in the application field of electron probe microanalysis(EPMA).In this paper,carbon was selected as an example,and CrTiAlC magnetron sputtering material was used as a sample,then several key points for accurate measurement of K factor of ultralight element were analyzed according to the quantitative analysis process of ZAF.Proper methods for background deduction were discussed through the qualitative spectra of analytical element.Graphite and diamond were selected as certified reference materials of carbon.The quantitative analysis re-sults were compared to discuss the importance of selection of certified reference materials.Moreover,how to properly use the pulse height analyzer(PHA)for peak filtering was also discussed in case of overlapping peak interference.
electron probe microanalysis(EPMA)K factorqualitative analysisbackground deductioncertified reference materialgraphitediamondpulse height analyzer(PHA)
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