Design and experimental study of core components of a 2.45 GHz ECR high-current plasma source
Electron Cyclotron Resonance(ECR)plasma sources can produce highly charged ions and high-current single-charged ions,providing stable beam and good repeatability.The design of the core components is crucial to the ECR plasma source,as the magnetic field has a direct impact on the generation and distribution of the plasma.Finite element analysis was used to analyze and design the magnetic field of the ECR plasma source,and a magnetic field configuration that meets the design requirements and targets was obtained.The axial mag-netic field of the designed permanent magnet was accurately measured using a Gaussmeter,and the simulation re-sults were found to be in good agreement with the experimental results,with only slight deviations in the maxi-mum value and corresponding position of the axial magnetic field.Through integrated experiments,the effect of the core components on the beam current extracted from the ion source was studied,and a stable beam current with an intensity of up to 7mA was achieved.
ECR plasma sourceMagnetic field designExtraction of beam
国家科技期刊平台
NSTL
万方数据
维普
