2.45GHz ECR强流等离子体源核心部件设计与实验研究
Design and experimental study of core components of a 2.45 GHz ECR high-current plasma source
李钢 1陈根 2段文学 2彭标 3尉传颂4
作者信息
- 1. 安徽建筑大学 电子与信息工程学院,合肥 230601;中国科学院合肥物质研究院等离子体物理研究所,合肥 230031
- 2. 中国科学院合肥物质研究院等离子体物理研究所,合肥 230031
- 3. 中国科学院合肥物质研究院等离子体物理研究所,合肥 230031;安徽大学 物质科学与信息技术研究院,合肥 230601
- 4. 合肥中科离子医学技术装备有限公司,合肥 230088
- 折叠
摘要
电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源能产生高电荷态离子、高流强的单电荷态离子,提供稳定的束流和良好的重复性.核心部件的设计对ECR等离子体源是至关重要的,磁场对等离子体的生成和分布有直接影响,良好的磁场可以提高等离子体的性能和效率.采用有限元分析方法对ECR等离子体源磁场进行分析与设计,得到了满足设计需求与目标的磁场位形,通过高斯计对设计的永磁环轴向磁场精确测量,发现磁场仿真结果与实验结果吻合比较好,只是轴向磁场最大值及对应位置上有点偏差.通过集成实验,研究核心部件对离子源引出束流强度的影响,引出束流稳定且强度达到7 mA.
Abstract
Electron Cyclotron Resonance(ECR)plasma sources can produce highly charged ions and high-current single-charged ions,providing stable beam and good repeatability.The design of the core components is crucial to the ECR plasma source,as the magnetic field has a direct impact on the generation and distribution of the plasma.Finite element analysis was used to analyze and design the magnetic field of the ECR plasma source,and a magnetic field configuration that meets the design requirements and targets was obtained.The axial mag-netic field of the designed permanent magnet was accurately measured using a Gaussmeter,and the simulation re-sults were found to be in good agreement with the experimental results,with only slight deviations in the maxi-mum value and corresponding position of the axial magnetic field.Through integrated experiments,the effect of the core components on the beam current extracted from the ion source was studied,and a stable beam current with an intensity of up to 7mA was achieved.
关键词
ECR等离子体源/磁场设计/引出束流Key words
ECR plasma source/Magnetic field design/Extraction of beam引用本文复制引用
基金项目
国家重点研发计划(E05KCI25591)
出版年
2024
国家科技期刊平台
NSTL
维普
万方数据