Automatic Control of Measurement Error of Air Temperature Hygrometer in Clean Room Under Dynamic Compensation
The temperature and humidity meter is affected by environmental differences,equipment aging and damage,and human operation errors,resulting in significant measurement errors.Therefore,a dynamic compensation based au-tomatic control method for measurement errors of clean room air temperature and humidity meters is proposed.Based on the propagation coefficient integration of temperature and humidity measurement error data caused by differences in precision dew point meters,changes in temperature and humidity chamber humidity,repeated measurement of tem-perature and humidity meters,and the resolution of temperature and humidity meters,a stability function is introduced to describe the stability characteristics of the maximum allowable temperature and humidity error,and this function is used as a reference for the control device.Establish a mathematical relationship between temperature and humidity sensors and control devices,design an anti filtering compensator suitable for this problem based on the mathematical relationship,and use recursive methods to perform periodic measurement error parameter calibration and compensation processes to achieve dynamic compensation control.The experimental test results show that after being controlled by the proposed method,measurement results that are very close to the actual results can be obtained,and the measure-ment error is controlled within a very small range,ensuring that the measurement results of the insulation hygrometer have high accuracy.
dynamic compensation functionmeasurement error of temperature hygrometeranti filtering compensatorpropagation coefficien
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