Temperature Control System of Crystal Growth Furnace with Bridgman-stock-barger Method Based on Fuzzy Decoupling
Aiming at the problems of non-linearity,hysteresis and multi-temperature coupling in the temperature control system of crystal growth furnace with crucible lowering method.A fuzzy decoupling controller is designed to control the temperature of the upper and lower temperature zones of the growth furnace.The controller can adjust the power of the heating rods in the two temperature zones according to the real-time temperature error and the change rate of temperature error.Compared with the traditional decoupling and PID algorithms,this method has the advantages of precise mathematical model independent of the controlled object,less computation and simple algorithm design.Through simulation,the proposed method is compared with the traditional PID algorithm and the traditional decou-pling PID algorithm respectively.The simulation results show that the proposed method has good dynamic perfor-mance,decoupling ability and robustness,which is conducive to improving the temperature control accuracy and heat-ing efficiency of the crystal growth furnace.
bridgman-stockbarger methodcrystal growing furnacemulti-temperature coupled systemdecoupling con-trolfuzzy control
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