Design of Segmented High Power Remote Plasma Source System
Existing remote plasma source systems generally have problems such as low output power,narrow system load adaptation range and unstable plasma concentration.Based on the analysis of discharge mode and load charac-teristics of TCP cavity,this paper proposes a segmented high-power remote plasma source system.The improved pow-er circuit improves the output power of the power supply.The separated ignition circuit simplifies the circuit design and improves the degree of freedom,and the segmented control strategy greatly improves the system load adaptation range,which can ionize a variety of gases and a wider range of gas flow.The feasibility of the system design is ver-ified by the actual prototype test,which provides a reference value for the design of plasma power supply.
NETL
NSTL
万方数据
维普
