石墨舟清洁等离子电源设计与控制
Design and Control of Graphite Boat Clean Plasma Power Supply
薛家祥 1王一统 1马财钰 1金礼2
作者信息
- 1. 华南理工大学 机械与汽车工程学院,广州 510640
- 2. 贵州民族大学 物理与机电工程学院,贵阳 550000
- 折叠
摘要
针对现有的石墨舟清洁等离子体电源控制系统动态响应不及时,无法适应大功率调节范围和系统稳定性差的问题,提出了一种等离子体电源设计与控制方法,根据等离子电源的工作原理与负载特性,通过PFM&PSPWM混合调制的控制策略,改变执行频率和移相角,实现了对于多种等离子负载宽功率范围的适应性和全桥逆变的软开关,提高了系统的适应性和稳定性.基于TMS280049研制样机验证了方案的可行性,表明本设计具有实际应用价值.
Abstract
A plasma power supply design and control method is proposed to address the issues of untimely dynamic response,inability to adapt to high-power regulation range,and poor system stability in the existing graphite boat cleaning plasma power supply control system.Based on the working principle and load characteristics of the plasma power supply,a PFM&PSPWM hybrid modulation strategy is used to change the execution frequency and phase shift angle,it has achieved adaptability to a wide power range of various plasma loads and soft switching of full bridge in-verters,improving the adaptability and stability of the system.The feasibility of the scheme was verified by develop-ing a prototype based on TMS280049,indicating that this design has practical application value.
关键词
等离子体电源/石墨舟清洁/DSP/PFM&PSPWM混合调制Key words
plasma power supply/graphite boat cleaning/DSP/PFM&PSPWM hybrid modulatin引用本文复制引用
基金项目
国家自然科学基金(51875213)
广东省自然科学基金(2214050007061)
贵州省省级科技计划(ZK[2022]198)
贵州省高等学校教学内容和课程体系改革项目(2021083)
出版年
2024
NETL
NSTL
万方数据