Design and Control of Graphite Boat Clean Plasma Power Supply
A plasma power supply design and control method is proposed to address the issues of untimely dynamic response,inability to adapt to high-power regulation range,and poor system stability in the existing graphite boat cleaning plasma power supply control system.Based on the working principle and load characteristics of the plasma power supply,a PFM&PSPWM hybrid modulation strategy is used to change the execution frequency and phase shift angle,it has achieved adaptability to a wide power range of various plasma loads and soft switching of full bridge in-verters,improving the adaptability and stability of the system.The feasibility of the scheme was verified by develop-ing a prototype based on TMS280049,indicating that this design has practical application value.
plasma power supplygraphite boat cleaningDSPPFM&PSPWM hybrid modulatin
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