Improvement of Impact Resistance Design for Silicon Piezoresisitive Pressure Sensor
In hydraulic servo systems,pressure sensor is important devices,silicon piezoresistive pressure sensors are widely used.Due to the pressure sensor encountering harsh environments of pressure shock.Strong pressure impact can cause the corrugated diaphragm of the pressure sensitive core to sink or even tear.In order to solve the problem,this paper use the damping principle of hydraulic systems,damping design has been added to the pressure sensor.Use AMESim to model and simulate the design,and conduct actual testing on he improved sensor.The results indi-cate that the improved damping design can enhance the impact resistance of silicon piezoresisitive pressure sensor.